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  1. PECVD and CVD carbon nanotube growth systems, CNT growth tools for aligned MWCNT and SWCNT growth at CMOS compatible temperatures

    carbon nanotube equipment and nanowire deposition systems for low temperature, CVD, PECVD and ICP growth of nanotubes, nanowires, DLC, PECVD silicon thin films, ...
    PVD1
    CVD1
    vacuum systems1
    PECVD1
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    wafer fabrication1
    nanostructure1
    semiconductor fabrication1
    plasma source1
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    MEMS fabrication1
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    NanoSoft1
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    GammaSoft1
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    sputtering tools1
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    carbon nanotube tool0
    Gamma10000
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    www.surreynanosystems.com - 2009-02-10

nanomatic1 atom source1 nanomedicine1 specifications2 spec2 nano2 nanolinux1 thin film growth1 specs2 nanoparticles1 custom5 nanotechnology2 nanomaterials1 nanoscience1

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